Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization
نویسندگان
چکیده
منابع مشابه
Fourier domain optical tool normalization for quantitative parametric image reconstruction.
There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to nanometer-scale changes has been observed when measuring critical dimensions of subwavelength 20 nm features or when imaging defects below 15 nm using angle-resolved and focus-resolved optical data. However, these metho...
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ژورنال
عنوان ژورنال: Light: Science & Applications
سال: 2016
ISSN: 2047-7538
DOI: 10.1038/lsa.2016.38